JPH0373449U - - Google Patents

Info

Publication number
JPH0373449U
JPH0373449U JP13523889U JP13523889U JPH0373449U JP H0373449 U JPH0373449 U JP H0373449U JP 13523889 U JP13523889 U JP 13523889U JP 13523889 U JP13523889 U JP 13523889U JP H0373449 U JPH0373449 U JP H0373449U
Authority
JP
Japan
Prior art keywords
suction ports
protruding
plate
suction
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13523889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13523889U priority Critical patent/JPH0373449U/ja
Publication of JPH0373449U publication Critical patent/JPH0373449U/ja
Pending legal-status Critical Current

Links

JP13523889U 1989-11-20 1989-11-20 Pending JPH0373449U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13523889U JPH0373449U (en]) 1989-11-20 1989-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13523889U JPH0373449U (en]) 1989-11-20 1989-11-20

Publications (1)

Publication Number Publication Date
JPH0373449U true JPH0373449U (en]) 1991-07-24

Family

ID=31682518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13523889U Pending JPH0373449U (en]) 1989-11-20 1989-11-20

Country Status (1)

Country Link
JP (1) JPH0373449U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021038466A (ja) * 2020-11-20 2021-03-11 株式会社荏原製作所 基板ホルダ、電子デバイス製造装置において基板を搬送する搬送システム、および電子デバイス製造装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59137368A (ja) * 1983-01-25 1984-08-07 新日本製鐵株式会社 補修用不定形耐火物
JPS61156749A (ja) * 1984-12-27 1986-07-16 Nec Corp ウエハ−ス平板型裏面真空チヤツク
JPS61208234A (ja) * 1985-03-13 1986-09-16 Matsushita Electronics Corp 真空チヤツク
JPS63127844A (ja) * 1986-11-17 1988-05-31 Hitachi Ltd 真空吸着装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59137368A (ja) * 1983-01-25 1984-08-07 新日本製鐵株式会社 補修用不定形耐火物
JPS61156749A (ja) * 1984-12-27 1986-07-16 Nec Corp ウエハ−ス平板型裏面真空チヤツク
JPS61208234A (ja) * 1985-03-13 1986-09-16 Matsushita Electronics Corp 真空チヤツク
JPS63127844A (ja) * 1986-11-17 1988-05-31 Hitachi Ltd 真空吸着装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021038466A (ja) * 2020-11-20 2021-03-11 株式会社荏原製作所 基板ホルダ、電子デバイス製造装置において基板を搬送する搬送システム、および電子デバイス製造装置

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